H.V. Jansen (Henri)
H.V. Jansen (Henri)
Associate Professor, Universiteit Twente
Verified email at utwente.nl
Cited by
Cited by
Stiction in surface micromachining
N Tas, T Sonnenberg, H Jansen, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 6 (4), 385, 1996
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control
H Jansen, M de Boer, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 5 (2), 115, 1995
Silicon micromachining
M Elwenspoek, HV Jansen
Cambridge University Press, 2004
A survey on the reactive ion etching of silicon in microtechnology
H Jansen, H Gardeniers, M de Boer, M Elwenspoek, J Fluitman
Journal of micromechanics and microengineering 6 (1), 14, 1996
Capillary filling speed of water in nanochannels
NR Tas, J Haneveld, HV Jansen, M Elwenspoek, A van den Berg
Applied Physics Letters 85 (15), 3274-3276, 2004
The μ-flown: a novel device for measuring acoustic flows
HE de Bree, P Leussink, T Korthorst, H Jansen, TSJ Lammerink, ...
Sensors and actuators A: Physical 54 (1-3), 552-557, 1996
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures
MJ De Boer, JGE Gardeniers, HV Jansen, E Smulders, MJ Gilde, ...
Journal of microelectromechanical systems 11 (4), 385-401, 2002
Silicon nitride nanosieve membrane
HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, ...
Nano letters 4 (2), 283-287, 2004
Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as …
HV Jansen, MJ de Boer, S Unnikrishnan, MC Louwerse, MC Elwenspoek
Journal of micromechanics and microengineering 19 (3), 033001, 2009
Micromachining of buried micro channels in silicon
MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ...
Journal of microelectromechanical systems 9 (1), 94-103, 2000
Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules
H Tilmans, E Beyne, H Jansen, W De Raedt
US Patent 6,876,056, 2005
Anisotropic reactive ion etching of silicon using SF 6/O 2/CHF 3 gas mixtures
R Legtenberg, H Jansen, M De Boer, M Elwenspoek
Journal of the electrochemical society 142 (6), 2020, 1995
Ta2O5 as gate dielectric material for low-voltage organic thin-film transistors
C Bartic, H Jansen, A Campitelli, S Borghs
Organic electronics 3 (2), 65-72, 2002
BSM 7: RIE lag in high aspect ratio trench etching of silicon
H Jansen, M de Boer, R Wiegerink, N Tas, E Smulders, C Neagu, ...
Microelectronic Engineering 35 (1-4), 45-50, 1997
Capillary filling of sub- nanochannels
J Haneveld, NR Tas, N Brunets, HV Jansen, M Elwenspoek
Journal of applied physics 104 (1), 014309, 2008
High resolution powder blast micromachining
H Wensink, JW Berenschot, HV Jansen, MC Elwenspoek
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro …, 2000
Characterization of a planar microcoil for implantable microsystems
CR Neagu, HV Jansen, A Smith, JGE Gardeniers, MC Elwenspoek
Sensors and Actuators A: Physical 62 (1-3), 599-611, 1997
The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches
H Jansen, M de Boer, J Burger, R Legtenberg, M Elwenspoek
Microelectronic engineering 27 (1-4), 475-480, 1995
Wet anisotropic etching for fluidic 1D nanochannels
J Haneveld, H Jansen, E Berenschot, N Tas, M Elwenspoek
Journal of micromechanics and microengineering 13 (4), S62, 2003
2D-confined nanochannels fabricated by conventional micromachining
NR Tas, JW Berenschot, P Mela, HV Jansen, M Elwenspoek, ...
Nano Letters 2 (9), 1031-1032, 2002
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