| The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films A Ababneh, U Schmid, J Hernando, JL Sánchez-Rojas, H Seidel Materials Science and Engineering: B 172 (3), 253-258, 2010 | 204 | 2010 |
| Modal optimization and filtering in piezoelectric microplate resonators JL Sanchez-Rojas, J Hernando, A Donoso, JC Bellido, T Manzaneque, ... Journal of micromechanics and microengineering 20 (5), 055027, 2010 | 81 | 2010 |
| Application of quartz tuning forks and extensional microresonators for viscosity and density measurements in oil/fuel mixtures J Toledo, T Manzaneque, J Hernando-García, J Vázquez, A Ababneh, ... Microsystem technologies 20, 945-953, 2014 | 66 | 2014 |
| c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes A Ababneh, M Alsumady, H Seidel, T Manzaneque, J Hernando-García, ... Applied Surface Science 259, 59-65, 2012 | 58 | 2012 |
| Etching behaviour of sputter-deposited aluminium nitride thin films in H3PO4 and KOH solutions A Ababneh, H Kreher, U Schmid Microsystem Technologies 14, 567-573, 2008 | 56 | 2008 |
| Characterization and simulation of the first extensional mode of rectangular micro-plates in liquid media T Manzaneque, V Ruiz, J Hernando-García, A Ababneh, H Seidel, ... Applied Physics Letters 101 (15), 2012 | 54 | 2012 |
| Simulation and laser vibrometry characterization of piezoelectric AlN thin films J Hernando, JL Sànchez-Rojas, S González-Castilla, E Iborra, A Ababneh, ... Journal of Applied Physics 104 (5), 2008 | 50 | 2008 |
| Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications Ü Sökmen, A Stranz, A Waag, A Ababneh, H Seidel, U Schmid, E Peiner Journal of Micromechanics and Microengineering 20 (6), 064007, 2010 | 46 | 2010 |
| Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid T Manzaneque, J Hernando, L Rodríguez-Aragón, A Ababneh, H Seidel, ... Microsystem technologies 16, 837-845, 2010 | 41 | 2010 |
| Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films AM Alsaad, QM Al-Bataineh, IA Qattan, AA Ahmad, A Ababneh, ... Frontiers in Physics 8, 115, 2020 | 35 | 2020 |
| Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substrates A Bittner, A Ababneh, H Seidel, U Schmid Applied surface science 257 (3), 1088-1091, 2010 | 35 | 2010 |
| Design and characterization of AlN-based in-plane microplate resonators V Ruiz-Díez, T Manzaneque, J Hernando-García, A Ababneh, M Kucera, ... Journal of Micromechanics and Microengineering 23 (7), 074003, 2013 | 28 | 2013 |
| Improved performance of top-emitting oxide-confined polyimide-planarized 980 nm VCSELs with copper-plated heat sinks AN Al-Omari, MS Alias, A Ababneh, KL Lear Journal of Physics D: Applied Physics 45 (50), 505101, 2012 | 26 | 2012 |
| Quality-factor amplification in piezoelectric MEMS resonators applying an all-electrical feedback loop T Manzaneque, J Hernando-García, A Ababneh, P Schwarz, H Seidel, ... Journal of Micromechanics and Microengineering 21 (2), 025007, 2011 | 25 | 2011 |
| Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode V Ruiz, J Hernando-García, A Ababneh, H Seidel, U Schmid, ... Microsystem technologies 18, 997-1001, 2012 | 21 | 2012 |
| Electrical and morphological characterization of platinum thin-films with various adhesion layers for high temperature applications A Ababneh, AN Al-Omari, AMK Dagamseh, M Tantawi, C Pauly, ... Microsystem Technologies 23, 703-709, 2017 | 20 | 2017 |
| Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators J Hernando, JL Sánchez-Rojas, U Schmid, A Ababneh, G Marchand, ... Microsystem technologies 16, 855-861, 2010 | 19 | 2010 |
| Fourier transform mechanical spectroscopy of micro-fabricated electromechanical resonators: a novel, information-rich pulse method for sensor applications RP Wali, PR Wilkinson, SP Eaimkhong, J Hernando-Garcia, ... Sensors and Actuators B: Chemical 147 (2), 508-516, 2010 | 15 | 2010 |
| Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressures A Ababneh, AMK Dagamseh, Z Albataineh, M Tantawi, QM Al-Bataineh, ... Microsystem Technologies, 1-11, 2021 | 14 | 2021 |
| Piezoelectric MEMS linear motor for nanopositioning applications V Ruiz-Díez, J Hernando-García, J Toledo, A Ababneh, H Seidel, ... Actuators 10 (2), 36, 2021 | 13 | 2021 |
Seidel, HelmutProfessor für Mikromechanik, Mikrofluidik/Mikroaktorik, Saarland UniversityVerified email at lmm.uni-saarland.de
