Liquid droplet dispersions formed by homogeneous liquid− liquid nucleation:“The Ouzo Effect” SA Vitale, JL Katz Langmuir 19 (10), 4105-4110, 2003 | 530 | 2003 |
Manufacturing a semiconductive device using a controlled atomic layer removal process SA Vitale US Patent 7,494,882, 2009 | 415 | 2009 |
Valleytronics: opportunities, challenges, and paths forward SA Vitale, D Nezich, JO Varghese, P Kim, N Gedik, P Jarillo‐Herrero, ... Small 14 (38), 1801483, 2018 | 320 | 2018 |
Silicon etching yields in and HBr high density plasmas SA Vitale, H Chae, HH Sawin Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19 (5 …, 2001 | 149 | 2001 |
Ultra-compact nonvolatile phase shifter based on electrically reprogrammable transparent phase change materials C Ríos, Q Du, Y Zhang, CC Popescu, MY Shalaginov, P Miller, C Roberts, ... PhotoniX 3 (1), 26, 2022 | 147 | 2022 |
FDSOI process technology for subthreshold-operation ultralow-power electronics SA Vitale, PW Wyatt, N Checka, J Kedzierski, CL Keast Proceedings of the IEEE 98 (2), 333-342, 2010 | 136 | 2010 |
Work-function-tuned TiN metal gate FDSOI transistors for subthreshold operation SA Vitale, J Kedzierski, P Healey, PW Wyatt, CL Keast IEEE Transactions on Electron Devices 58 (2), 419-426, 2010 | 127 | 2010 |
Plasma–surface kinetics and simulation of feature profile evolution in etching of polysilicon W Jin, SA Vitale, HH Sawin Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 20 (6 …, 2002 | 117 | 2002 |
Multi‐level electro‐thermal switching of optical phase‐change materials using graphene C Ríos, Y Zhang, MY Shalaginov, S Deckoff-Jones, H Wang, S An, ... Advanced Photonics Research 2 (1), 2000034, 2021 | 93 | 2021 |
Reduction of silicon recess caused by plasma oxidation during high-density plasma polysilicon gate etching SA Vitale, BA Smith Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2003 | 91 | 2003 |
Progress toward diamond power field‐effect transistors MW Geis, TC Wade, CH Wuorio, TH Fedynyshyn, B Duncan, ME Plaut, ... physica status solidi (a) 215 (22), 1800681, 2018 | 81 | 2018 |
Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform J Zhu, JH Park, SA Vitale, W Ge, GS Jung, J Wang, M Mohamed, T Zhang, ... Nature Nanotechnology 18 (5), 456-463, 2023 | 65 | 2023 |
Method of simultaneously siliciding a polysilicon gate and source/drain of a semiconductor device, and related device F Mehrad, S Yu, SA Vitale, JG Tran US Patent 7,727,842, 2010 | 49 | 2010 |
Etching chemistry of benzocyclobutene (BCB) low-k dielectric films in and high density plasmas SA Vitale, H Chae, HH Sawin Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 18 (6 …, 2000 | 49 | 2000 |
Effect of surface roughness and H–termination chemistry on diamond's semiconducting surface conductance T Wade, MW Geis, TH Fedynyshyn, SA Vitale, JO Varghese, DM Lennon, ... Diamond and Related Materials 76, 79-85, 2017 | 45 | 2017 |
Etching of organosilicate glass low-k dielectric films in halogen plasmas SA Vitale, HH Sawin Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 20 (3 …, 2002 | 45 | 2002 |
Silicon dioxide etching yield measurements with inductively coupled fluorocarbon plasmas H Chae, SA Vitale, HH Sawin Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21 (2 …, 2003 | 40 | 2003 |
The effect of a carbon-carbon double bond on electron beam-generated plasma decomposition of trichloroethylene and 1, 1, 1-trichloroethane SA Vitale, K Hadidi, DR Cohn, P Falkos Plasma Chemistry and Plasma Processing 17, 59-78, 1997 | 32 | 1997 |
Transient tap couplers for wafer-level photonic testing based on optical phase change materials Y Zhang, Q Zhang, C Ríos, MY Shalaginov, JB Chou, C Roberts, P Miller, ... ACS Photonics 8 (7), 1903-1908, 2021 | 28 | 2021 |
Chemical and semiconducting properties of NO2-activated H-terminated diamond MW Geis, TH Fedynyshyn, ME Plaut, TC Wade, CH Wuorio, SA Vitale, ... Diamond and Related Materials 84, 86-94, 2018 | 24 | 2018 |