Costas Spanos
Costas Spanos
Professor of Electrical Engineering and Computer Sciences, University of California, Berkeley
Verified email at berkeley.edu
Title
Cited by
Cited by
Year
Fundamentals of semiconductor manufacturing and process control
GS May, CJ Spanos
John Wiley & Sons, 2006
4062006
Modeling within-die spatial correlation effects for process-design co-optimization
P Friedberg, Y Cao, J Cain, R Wang, J Rabaey, C Spanos
Sixth international symposium on quality electronic design (isqed'05), 516-521, 2005
2532005
Maintenance unit for a sensor apparatus
ML Freed, RS Mundt, CJ Spanos
US Patent 7,282,889, 2007
238*2007
Specular spectroscopic scatterometry
X Niu, N Jakatdar, J Bao, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 14 (2), 97-111, 2001
1952001
Distributed energy consumption control via real-time pricing feedback in smart grid
K Ma, G Hu, CJ Spanos
IEEE Transactions on Control Systems Technology 22 (5), 1907-1914, 2014
1402014
Measurement and analysis of variability in 45 nm strained-Si CMOS technology
LT Pang, K Qian, CJ Spanos, B Nikolic
IEEE Journal of Solid-State Circuits 44 (8), 2233-2243, 2009
1352009
Real-time statistical process control using tool data (semiconductor manufacturing)
CJ Spanos, HF Guo, A Miller, J Levine-Parrill
IEEE Transactions on Semiconductor Manufacturing 5 (4), 308-318, 1992
1341992
Statistical experimental design in plasma etch modeling
GS May, J Huang, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 4 (2), 83-98, 1991
1301991
Specular spectroscopic scatterometry in DUV lithography
X Niu, NH Jakatdar, J Bao, CJ Spanos, SK Yedur
Metrology, Inspection, and Process Control for Microlithography XIII 3677 …, 1999
1161999
Semiconductor yield improvement: results and best practices
SP Cunningham, CJ Spanos, K Voros
IEEE Transactions on Semiconductor Manufacturing 8 (2), 103-109, 1995
1141995
Statistical equipment modeling for VLSI manufacturing: An application for LPCVD
KK Lin, CJ Spanos
IEEE transactions on semiconductor manufacturing 3 (4), 216-229, 1990
1011990
Gate line edge roughness model for estimation of FinFET performance variability
K Patel, TJK Liu, CJ Spanos
IEEE Transactions on Electron Devices 56 (12), 3055-3063, 2009
892009
Statistical process control in semiconductor manufacturing
CJ Spanos
Proceedings of the IEEE 80 (6), 819-830, 1992
881992
MOD-DR: Microgrid optimal dispatch with demand response
M Jin, W Feng, P Liu, C Marnay, C Spanos
Applied Energy 187, 758-776, 2017
862017
Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control
ML Freed, RS Mundt, CJ Spanos
US Patent 6,691,068, 2004
842004
Model-based fault detection and identification for switching power converters
J Poon, P Jain, IC Konstantakopoulos, C Spanos, SK Panda, SR Sanders
IEEE Transactions on Power Electronics 32 (2), 1419-1430, 2016
802016
Accurate indoor localization and tracking using mobile phone inertial sensors, WiFi and iBeacon
H Zou, Z Chen, H Jiang, L Xie, C Spanos
2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2017
762017
A control system for photolithographic sequences
S Leang, SY Ma, J Thomson, BJ Bombay, CJ Spanos
IEEE transactions on semiconductor manufacturing 9 (2), 191-207, 1996
731996
A cooperative demand response scheme using punishment mechanism and application to industrial refrigerated warehouses
K Ma, G Hu, CJ Spanos
IEEE Transactions on Industrial Informatics 11 (6), 1520-1531, 2015
712015
Use of short-loop electrical measurements for yield improvement
C Yu, T Maung, CJ Spanos, DS Boning, JE Chung, HY Liu, KJ Chang, ...
IEEE transactions on semiconductor manufacturing 8 (2), 150-159, 1995
711995
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