Investigation of 20% scandium-doped aluminum nitride films for MEMS laterally vibrating resonators L Colombo, A Kochhar, C Xu, G Piazza, S Mishin, Y Oshmyansky
2017 IEEE International Ultrasonics Symposium (IUS), 1-4, 2017
92 2017 X-Cut Lithium Niobate Laterally Vibrating MEMS Resonator With Figure of Merit of 1560 L Colombo, A Kochhar, G Vidal-Álvarez, G Piazza
Journal of Microelectromechanical Systems 27 (4), 602-604, 2018
61 2018 High-figure-of-merit X-cut lithium niobate MEMS resonators operating around 50 MHz for large passive voltage amplification in radio frequency applications L Colombo, A Kochhar, G Vidal-Alvarez, G Piazza
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 67 …, 2020
53 2020 Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios G Giribaldi, L Colombo, P Simeoni, M Rinaldi
Nature Communications 15 (1), 304, 2024
44 2024 Resonant Microelectromechanical Receiver A Kochhar, ME Galanko, M Soliman, H Abdelsalam, L Colombo, YC Lin, ...
Journal of Microelectromechanical Systems 28 (3), 327-343, 2019
38 2019 Aluminum nitride two-dimensional-resonant-rods X Zhao, L Colombo, C Cassella
Applied Physics Letters 116 (14), 2020
31 2020 Characterization of Dielectric and Piezoelectric Properties of Ferroelectric AlScN Thin Films M Pirro, B Herrera, M Assylbekova, G Giribaldi, L Colombo, M Rinaldi
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021
29 2021 Sub-GHz X-Cut Lithium Niobate S ₀ Mode MEMS Resonators L Colombo, A Kochhar, G Vidal-Álvarez, P Simeoni, U Soysal, G Piazza
Journal of Microelectromechanical Systems 31 (6), 888-900, 2022
24 2022 11 GHz Lateral-Field-Excited Aluminum Nitride Cross-Sectional Lamé Mode Resonator M Assylbekova, G Chen, G Michetti, M Pirro, L Colombo, M Rinaldi
2020 Joint Conference of the IEEE International Frequency Control Symposium …, 2020
22 2020 Investigation on the Impact of Scandium-doping on the kt2 of ScxAl1-xN Cross-sectional Lamé Mode Resonators G Giribaldi, L Colombo, F Bersano, C Cassella, M Rinaldi
2020 IEEE International Ultrasonics Symposium (IUS), 1-4, 2020
21 2020 6-20 GHz 30% ScAlN Lateral Field-Excited Cross-sectional Lame’Mode Resonators for future mobile RF Front-Ends G Giribaldi, L Colombo, M Rinaldi
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2023
19 2023 VHF and UHF Lithium Niobate MEMS Resonators Exceeding 30 dB of Passive Gain L Colombo, MEG Klemash, TM Kiebala, SS Bedair, G Piazza, M Rinaldi
IEEE Electron Device Letters 42 (12), 1853-1856, 2021
17 2021 Compensation of Contact Nature-Dependent Asymmetry in The Leakage Current of Ferroelectric Scx Al1−x N Thin-Film Capacitors G Giribaldi, M Pirro, BH Soukup, M Assylbekova, L Colombo, M Rinaldi
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021
17 2021 A 5.3 GHz Al X Zhao, O Kaya, M Pirro, M Assylbekova, L Colombo, P Simeoni, ...
Journal of Microelectromechanical Systems, 2022
16 2022 Experimental investigation of damping factors in 20% scandium-doped aluminum nitride laterally vibrating resonators ZA Schaffer, L Colombo, AS Kochhar, G Piazza, S Mishin, Y Oshmyansky
2018 IEEE Micro Electro Mechanical Systems (MEMS), 787-790, 2018
16 2018 Ultra-low-power and high sensitivity resonant micromechanical receiver L Colombo, MB Galanko, H Abdelsalam, A Kochhar, G Vidal-Alvarez, ...
2017 IEEE SENSORS, 1-3, 2017
15 2017 High-Crystallinity 30% Scaln Enabling High Figure of Merit X-Band Microacoustic Resonators for Mid-Band 6G G Giribaldi, P Simeoni, L Colombo, M Rinaldi
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems …, 2023
13 2023 Integration of bottom electrode in Y-cut lithium niobate thin films for high electromechanical coupling and high capacitance per unit area MEMS resonators A Kochhar, L Colombo, G Vidal-Alvarez, G Piazza
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017
12 2017 Comparison between different MEMS Laterally Vibrating Resonator Technologies for Passive Voltage Amplification in an RF Front-End System L Colombo, A Kochhar, G Vidal-Álvarez, Z Schaffer, P Simeoni, G Piazza
2018 IEEE MTT-S International Microwave Workshop Series on Advanced …, 2018
11 2018 A±0.5 dB, 6 nW RSSI Circuit With RF Power-to-Digital Conversion Technique for Ultra-Low Power IoT Radio Applications A Mittal, N Mirchandani, G Michetti, L Colombo, T Haque, M Rinaldi, ...
IEEE Transactions on Circuits and Systems I: Regular Papers 69 (9), 3526-3539, 2022
10 2022 
Matteo RinaldiDirector, Institute for NanoSystems Innovation at Northeastern UniversityAdresse e-mail validée de ece.neu.edu
