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Yasuhiro Katsumata
Yasuhiro Katsumata
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Self-aligned nickel-mono-silicide technology for high-speed deep submicrometer logic CMOS ULSI
T Morimoto, T Ohguro, S Momose, T Iinuma, I Kunishima, K Suguro, ...
IEEE Transactions on Electron Devices 42 (5), 915-922, 1995
3901995
Future perspective and scaling down roadmap for RF CMOS
E Morifuji, HS Momose, T Ohguro, T Yoshitomi, H Kimijima, F Matsuoka, ...
1999 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No …, 1999
1591999
A NiSi salicide technology for advanced logic devices
T Morimoto, HS Momose, T Iinuma, I Kunishima, K Suguro, H Okana, ...
International Electron Devices Meeting 1991 [Technical Digest], 653-656, 1991
1391991
An 0.18-/spl mu/m CMOS for mixed digital and analog applications with zero-volt-V/sub th/epitaxial-channel MOSFETs
T Ohguro, H Naruse, H Sugaya, E Morifuji, S Nakamura, T Yoshitomi, ...
IEEE Transactions on Electron Devices 46 (7), 1378-1383, 1999
1371999
Study of the manufacturing feasibility of 1.5-nm direct-tunneling gate oxide MOSFETs: Uniformity, reliability, and dopant penetration of the gate oxide
HS Momose, SI Nakamura, T Ohguro, T Yoshitomi, E Morifuji, T Morimoto, ...
IEEE transactions on electron devices 45 (3), 691-700, 1998
1371998
High-frequency AC characteristics of 1.5 nm gate oxide MOSFETs
HS Momose, E Morifuji, T Yoshitomi, T Ohguro, I Saito, T Morimoto, ...
International Electron Devices Meeting. Technical Digest, 105-108, 1996
1251996
High performance 35 nm gate length CMOS with NO oxynitride gate dielectric and Ni salicide
S Inaba, K Okano, S Matsuda, M Fujiwara, A Hokazono, K Adachi, ...
IEEE Transactions on Electron Devices 49 (12), 2263-2270, 2002
742002
A novel lateral bipolar transistor with 67 GHz f/sub max/on thin-film SOI for RF analog applications
H Nii, T Yamada, K Inoh, T Shino, S Kawanaka, M Yoshimi, Y Katsumata
IEEE Transactions on electron devices 47 (7), 1536-1541, 2000
732000
Manufacturing method of semiconductor device comprising BiCMOS transistor
K Inoh, Y Katsumata, S Matsuda, C Yoshino
US Patent 5,620,908, 1997
581997
High performance 35 nm gate length CMOS with NO oxynitride gate dielectric and ni SALICIDE
S Inaba, K Okano, S Matsuda, M Fujiwara, A Hokazono, K Adachi, ...
International Electron Devices Meeting. Technical Digest (Cat. No. 01CH37224 …, 2001
512001
High performance RF characteristics of raised gate/source/drain CMOS with Co salicide
T Ohguro, H Naruse, H Sugaya, S Nakamura, E Morifuji, H Kimijima, ...
1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No …, 1998
511998
A study of hot-carrier degradation in n-and p-MOSFETs with ultra-thin gate oxides in the direct-tunneling regime
HS Momose, SI Nakamura, T Ohguro, T Yoshitomi, E Morifuji, T Morimoto, ...
International Electron Devices Meeting. IEDM Technical Digest, 453-456, 1997
411997
Thermal stability of CoSi/sub 2/film for CMOS salicide
T Ohguro, M Saito, E Morifuji, T Yoshitomi, T Morimoto, HS Momose, ...
IEEE Transactions on Electron Devices 47 (11), 2208-2213, 2000
392000
The future of ultra-small-geometry MOSFETs beyond 0.1 micron
H Iwai, HS Momose, M Saito, M Ono, Y Katsumata
Microelectronic Engineering 28 (1-4), 147-154, 1995
391995
A study of flicker noise in n-and p-MOSFETs with ultra-thin gate oxide in the direct-tunneling regime
HS Momose, H Kimijima, S Ishizuka, Y Miyahara, T Ohguro, T Yoshitomi, ...
International Electron Devices Meeting 1998. Technical Digest (Cat. No …, 1998
371998
Method of manufacturing bipolar semiconductor device
Y Katsumata, T Ito
US Patent 4,782,030, 1988
361988
A 31 GHz f/sub max/lateral BJT on SOI using self-aligned external base formation technology
T Shino, K Inoh, T Yamada, H Nii, S Kawanaka, T Fuse, M Yoshimi, ...
International Electron Devices Meeting 1998. Technical Digest (Cat. No …, 1998
341998
Undoped epitaxial Si channel n-MOSFET grown by UHV-CVD with preheating
T Ohguro, N Sugiyama, S Imai, K Usuda, M Saito, T Yoshitomi, M Ono, ...
IEEE Transactions on Electron Devices 45 (3), 710-716, 1998
321998
On-chip spiral inductors with diffused shields using channel-stop implant
T Yoshitomi, Y Sugawara, E Morifuji, T Ohguro, H Kimijima, T Morimoto, ...
International Electron Devices Meeting 1998. Technical Digest (Cat. No …, 1998
301998
An SPDD p-MOSFET structure suitable for 0.1 and sub 0.1 micron channel length and its electrical characteristics
Saito, Yoshitomi, Ono, Akasaka, Nii, Matsuda, Momose, Katsumata, ...
1992 International Technical Digest on Electron Devices Meeting, 897-900, 1992
301992
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