Ramin Mirzazadeh
Ramin Mirzazadeh
Verified email at polimi.it - Homepage
Title
Cited by
Cited by
Year
Micromechanical characterization of polysilicon films through on-chip tests
R Mirzazadeh, S Eftekhar Azam, S Mariani
Sensors 16 (8), 1191, 2016
202016
Mechanical characterization of polysilicon MEMS: A hybrid TMCMC/POD-kriging approach
R Mirzazadeh, S Eftekhar Azam, S Mariani
Sensors 18 (4), 1243, 2018
132018
Uncertainty quantification of microstructure—governed properties of polysilicon MEMS
R Mirzazadeh, S Mariani
Micromachines 8 (8), 248, 2017
112017
Assessment of overetch and polysilicon film properties through on-chip tests
R Mirzazadeh, AF Ghisi, S Mariani
2nd International Electronic Conference on Sensors and Applications, 1-7, 2015
92015
Statistical investigation of the mechanical and geometrical properties of polysilicon films through on-chip tests
R Mirzazadeh, A Ghisi, S Mariani
Micromachines 9 (2), 53, 2018
72018
Fluid damping in compliant, comb-actuated torsional micromirrors
R Mirzazadeh, S Mariani, A Ghisi, M De Fazio
2014 15th International Conference on Thermal, Mechanical and Mulit-Physics …, 2014
72014
Modeling of fluid damping in resonant micro-mirrors with out-of-plane comb-drive actuation
R Mirzazadeh, S Mariani, M De Fazio
Proceedings of the 1st International Electronic Conference on Sensors and …, 2014
62014
On-Chip testing: a miniaturized lab to assess sub-micron uncertainties in polysilicon MEMS
S Mariani, A Ghisi, R Mirzazadeh, SE Azam
Micro and Nanosystems 10 (2), 84-93, 2018
52018
Uncertainty quantification in polysilicon MEMS through on-chip testing and reduced-order modelling
R Mirzazadeh, SE Azam, E Jansen, S Mariani
2017 18th International Conference on Thermal, Mechanical and Multi-Physics …, 2017
52017
Assessment of micromechanically-induced uncertainties in the electromechanical response of MEMS devices
R Mirzazadeh, S Mariani
Multidisciplinary Digital Publishing Institute Proceedings 1 (2), 39, 2016
52016
Micromechanical characterization of polysilicon films: on-chip testing, multi-uncertainty quantification and Bayesian inverse modelling
R MIRZAZADEH
Italy, 2017
32017
Estimation of air damping in out-of-plane comb-drive actuators
R Mirzazadeh, S Mariani
Micromachines 10 (4), 263, 2019
22019
PE-ALD ALE
S Mariani, A Ghisi, R Mirzazadeh, SE Azam
Synthesis 10 (2), 102, 2018
2018
Multiphysics simulation of electrostatically actuated micromirrors in viscous medium
R Mirzazadeh
Italy, 2013
2013
Micromechanical modeling of brittle polycrystalline films
S Mariani, A Ghisi, R Mirzazadeh
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Articles 1–15