| Liquid-metal-jet anode electron-impact x-ray source O Hemberg, M Otendal, HM Hertz Applied Physics Letters 83 (7), 1483-1485, 2003 | 247 | 2003 |
| Liquid-tin-jet laser-plasma extreme ultraviolet generation PAC Jansson, BAM Hansson, O Hemberg, M Otendal, A Holmberg, ... applied physics letters 84 (13), 2256-2258, 2004 | 107 | 2004 |
| Method and apparatus for generating x-ray or euv radiation HM Hertz, O Ĥemberg, L Rymell, BAM Hansson, M Berglund US Patent 6,760,406, 2004 | 99 | 2004 |
| LPP EUV plasma source material target delivery system AN Bykanov, JM Algots, O Khodykin, O Hemberg US Patent 7,372,056, 2008 | 90 | 2008 |
| Method and apparatus for EUV plasma source target delivery JM Algots, IV Fomenkov, AI Ershov, WN Partlo, RL Sandstrom, ... US Patent 7,405,416, 2008 | 89 | 2008 |
| Nanometer-scale ablation with a table-top soft x-ray laser G Vaschenko, AG Etxarri, CS Menoni, JJ Rocca, O Hemberg, S Bloom, ... Optics letters 31 (24), 3615-3617, 2006 | 76 | 2006 |
| Method and apparatus for EUV light source target material handling JM Algots, O Hemberg, TH Chung US Patent 7,122,816, 2006 | 53 | 2006 |
| Characterization of a liquid-xenon-jet laser-plasma extreme-ultraviolet source BAM Hansson, O Hemberg, HM Hertz, M Berglund, HJ Choi, B Jacobsson, ... Review of scientific instruments 75 (6), 2122-2129, 2004 | 51 | 2004 |
| Hearing protector BM Bonney, ST Cheek, NA Echeverri, DD Fletcher, OM Hemberg US Patent App. 29/485,689, 2016 | 47 | 2016 |
| EUV collector debris management WN Partlo, RL Sandstrom, IV Fomenkov, AI Ershov, W Oldham, WF Marx, ... US Patent 8,075,732, 2011 | 43 | 2011 |
| Method and arrangement for producing radiation M Berglund, B Hansson, O Hemberg, H Hertz, L Rymell US Patent 7,239,686, 2007 | 43 | 2007 |
| Hearing protector DD Fletcher, BM Bonney, LJ Adams, NA Echeverri, OM Hemberg, ... US Patent App. 29/497,271, 2016 | 42 | 2016 |
| Liquid-metal-jet anode x-ray tube O Hemberg, M Otendal, HM Hertz Optical Engineering 43 (7), 1682-1688, 2004 | 41 | 2004 |
| Hearing protector BM Bonney, ST Cheek, NA Echeverri, DD Fletcher, OM Hemberg US Patent App. 29/471,083, 2016 | 39 | 2016 |
| Hearing protector DD Fletcher, NA Echeverri, EO Hemberg, OM Hemberg US Patent App. 29/548,934, 2018 | 36 | 2018 |
| Hearing protector DD Fletcher, NA Echeverri, KR Potter, BM Bonney, JT Lunn, GG Ipsen, ... US Patent App. 29/521,338, 2016 | 36 | 2016 |
| Status of the liquid-xenon-jet laser-plasma source for EUV lithography BAM Hansson, L Rymell, M Berglund, OE Hemberg, E Janin, J Thoresen, ... Emerging Lithographic Technologies VI 4688, 102-109, 2002 | 36 | 2002 |
| Hearing protector DD Fletcher, ST Cheek, BM Bonney, SC McGreevy, OM Hemberg US Patent App. 29/473,165, 2015 | 35 | 2015 |
| Stability of droplet-target laser-plasma soft x-ray sources O Hemberg, BAM Hansson, M Berglund, HM Hertz Journal of Applied Physics 88 (9), 5421-5425, 2000 | 34 | 2000 |
| Hearing protector DD Fletcher, LJ Adams, BM Bonney, NA Echeverri, GG Ipsen, ... US Patent App. 29/516,445, 2016 | 32 | 2016 |
Hans M HertzKTH, StockholmVerified email at biox.kth.se
