Mohammad Maroufi
Mohammad Maroufi
Inertial Sensing Hardware Engineer at Apple
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Title
Cited by
Cited by
Year
A high-bandwidth MEMS nanopositioner for on-chip AFM: Design, characterization, and control
M Maroufi, A Bazaei, SOR Moheimani
IEEE Transactions on Control Systems Technology 23 (2), 504-512, 2014
402014
High-stroke silicon-on-insulator MEMS nanopositioner: Control design for non-raster scan atomic force microscopy
M Maroufi, AG Fowler, A Bazaei, SOR Moheimani
Review of Scientific Instruments 86 (2), 023705, 2015
312015
Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners
A Bazaei, M Maroufi, AG Fowler, SOR Moheimani
IEEE Transactions on Control Systems Technology, 2016
282016
Compressibility Behaviour of Warp Knitted Spacer Fabrics Based on Elastic Curved Bar Theory
F Mokhtari, M Shamshirsaz, M Latifi, M Maroufi
Journal of Engineered Fibers and Fabrics 6 (4), 23-33, 2011
272011
A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors
M Maroufi, SO Moheimani
IEEE Sensors Journal 16, 1908-1917, 2016
252016
Displacement sensing with silicon flexures in MEMS nanopositioners
A Bazaei, M Maroufi, A Mohammadi, SOR Moheimani
Journal of microelectromechanical systems 23 (3), 502-504, 2014
242014
Optimal design analysis of electrothermally driven microactuators
SM Karbasi, M Shamshirsaz, M Naraghi, M Maroufi
Microsystem technologies 16 (7), 1065-1071, 2010
232010
On-chip dynamic mode atomic force microscopy: A silicon-on-insulator MEMS approach
MG Ruppert, AG Fowler, M Maroufi, SOR Moheimani
Journal of Microelectromechanical Systems 26 (1), 215-225, 2016
212016
Design, fabrication and characterization of a high-bandwidth 2DOF MEMS nanopositioner
M Maroufi, SOR Moheimani
2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics …, 2013
212013
MEMS for Nanopositioning: Design and Applications
M Maroufi, A Fowler, SOR Moheimani
Journal of Microelectromechanical Systems, 1 - 32, 2017
192017
Tilted beam piezoresistive displacement sensor: Design, modeling, and characterization
M Maroufi, A Bazaei, A Mohammadi, SOR Moheimani
Journal of Microelectromechanical Systems 24 (5), 1594-1605, 2015
172015
On-chip feedthrough cancellation methods for microfabricated AFM cantilevers with integrated piezoelectric transducers
MB Coskun, AG Fowler, M Maroufi, SOR Moheimani
Journal of Microelectromechanical Systems 26 (6), 1287-1297, 2017
142017
Size effect on performance of resonant piezoelectric millimeter-sized cantilevers using as liquid level detection sensors
M Maroufi, M Shamshirsaz
2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 42-46, 2012
122012
An adjustable-stiffness MEMS force sensor: Design, characterization, and control
M Maroufi, H Alemansour, MB Coskun, SOR Moheimani
Mechatronics 56, 198-210, 2018
102018
Control of an Active AFM Cantilever With Differential Sensing Configuration
MB Coskun, H Alemansour, AG Fowler, M Maroufi, SOR Moheimani
IEEE Transactions on Control Systems Technology 27 (5), 2271-2278, 2018
92018
Video-rate non-raster AFM imaging with cycloid trajectory
N Nikooienejad, A Alipour, M Maroufi, SOR Moheimani
IEEE Transactions on Control Systems Technology, 2018
72018
Tracking of constant-linear-velocity spiral trajectories by approximate internal model control
A Bazaei, M Maroufi, SOR Moheimani
2017 IEEE Conference on Control Technology and Applications (CCTA), 129-134, 2017
72017
A closed-loop mems force sensor with adjustable stiffness
M Maroufi, H Alemansour, SOR Moheimani
2017 IEEE Conference on Control Technology and Applications (CCTA), 438-443, 2017
72017
MEMS nanopositioner for on-chip atomic force microscopy: A serial kinematic design
M Maroufi, AG Fowler, SOR Moheimani
Journal of Microelectromechanical Systems 24 (6), 1730-1740, 2015
72015
Kalman filter enabled high-speed control of a MEMS nanopositioner
MG Ruppert, M Maroufi, A Bazaei, SOR Moheimani
IFAC-PapersOnLine 50 (1), 15554-15560, 2017
62017
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Articles 1–20