| A film bulk acoustic resonator based on ferroelectric aluminum scandium nitride films J Wang, M Park, S Mertin, T Pensala, F Ayazi, A Ansari Journal of Microelectromechanical Systems 29 (5), 741-747, 2020 | 103 | 2020 |
| Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content S Mertin, B Heinz, O Rattunde, G Christmann, MA Dubois, S Nicolay, ... Surface and Coatings Technology 343, 2-6, 2018 | 86 | 2018 |
| Abnormal grain growth in AlScN thin films induced by complexion formation at crystallite interfaces CS Sandu, F Parsapour, S Mertin, V Pashchenko, R Matloub, T LaGrange, ... physica status solidi (a) 216 (2), 1800569, 2019 | 81 | 2019 |
| Reactively sputtered coatings on architectural glazing for coloured active solar thermal façades S Mertin, V Hody-Le Caer, M Joly, I Mack, P Oelhafen, JL Scartezzini, ... Energy and Buildings 68, 764-770, 2014 | 54 | 2014 |
| Nanocrystalline Low‐Refractive Magnesium Fluoride Films Deposited by Reactive Magnetron Sputtering: Optical and Structural Properties S Mertin, L Marot, CS Sandu, R Steiner, JL Scartezzini, P Muralt Advanced Engineering Materials, 2015 | 29 | 2015 |
| Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: Influence of intrinsic stress and sputtering parameters S Mertin, V Pashchenko, F Parsapour, C Nyffeler, CS Sandu, B Heinz, ... 2017 IEEE International Ultrasonics Symposium (IUS), 1-4, 2017 | 28 | 2017 |
| Optical and morphological characterisation of low refractive index materials for coatings on solar collector glazing V Hody-Le Caër, E De Chambrier, S Mertin, M Joly, M Schaer, ... Renewable energy 53, 27-34, 2013 | 24 | 2013 |
| Characterization of AlScN-based multilayer systems for piezoelectric micromachined ultrasound transducer (pMUT) fabrication K Bespalova, E Österlund, G Ross, M Paulasto-Kröckel, AT Sebastian, ... Journal of Microelectromechanical Systems 30 (2), 290-298, 2021 | 17 | 2021 |
| A High- Switchable Ferroelectric Al0.7Sc0.3N Film Bulk Acoustic Resonator J Wang, M Park, S Mertin, T Pensala, F Ayazi, A Ansari 2020 Joint Conference of the IEEE International Frequency Control Symposium …, 2020 | 12 | 2020 |
| High-fidelity patterning of AlN and ScAlN thin films with wet chemical etching K Airola, S Mertin, J Likonen, E Hartikainen, K Mizohata, J Dekker, ... Materialia 22, 101403, 2022 | 11 | 2022 |
| Efficiency of silicon thin-film photovoltaic modules with a front coloured glass S Pélisset, M Joly, V Chapuis, A Schüler, S Mertin, HL Caër, C Ballif, ... Proceeding of the CISBAT International Conference 2011, 37-42, 2011 | 9 | 2011 |
| Coloured coatings for glazing of active solar thermal façades by reactive magnetron sputtering S Mertin, V Le Caër, M Joly, JL Scartezzini, A Schueler Proceedings of CISBAT 2011-CleanTech for Sustainable Buildings, 31-36, 2011 | 9 | 2011 |
| Microstructural and mechanical characterization of Cu/Sn SLID bonding utilizing Co as contact metallization layer F Emadi, V Vuorinen, S Mertin, K Widell, M Paulasto-Kröckel Journal of Alloys and Compounds 929, 167228, 2022 | 7 | 2022 |
| Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication V Pashchenko, S Mertin, F Parsapour, J Li, P Muralt, S Ballandras 2017 Joint Conference of the European Frequency and Time Forum and IEEE …, 2017 | 7 | 2017 |
| Cryomechanisms for the instruments MIRI and NIRSpec on the James Webb Space Telescope (JWST) R Hofferbert, D Lemke, U Groezinger, TFE Henning, S Mertin, RR Rohloff, ... Infrared Spaceborne Remote Sensing XI 5152, 70-82, 2003 | 6 | 2003 |
| Ex-situ AlN seed layer for (0001)-textured Al0.84 Sc0.16N thin films grown on SiO2 substrates F Parsapour, V Pashchenko, S Mertin, C Sandu, N Kurz, P Nicolay, ... Ultrasonics Symposium (IUS), 2017 IEEE International, 1-4, 2017 | 5 | 2017 |
| Temperature stability of electrode/AlScN multilayer systems for pMUT process integration K Bespalova, G Ross, M Paulasto-Kröckel, AS Thanniyil, C Karuthedath, ... 2020 IEEE International Ultrasonics Symposium (IUS), 1-4, 2020 | 4 | 2020 |
| Combinatorial study of low-refractive Mg–F–Si–O nano-composites deposited by magnetron co-sputtering from compound targets S Mertin, T Länzlinger, CS Sandu, JL Scartezzini, P Muralt Applied Surface Science 435, 170-177, 2018 | 4 | 2018 |
| Sputter deposition technology for Al(1−x)ScxN films with high Sc concentration B Heinz, S Mertin, O Rattunde, MA Dubois, S Nicolay, G Christmann, ... 2017 China Semiconductor Technology International Conference (CSTIC), 1-3, 2017 | 4 | 2017 |
| Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces (Phys. Status Solidi A 2∕ 2019) CS Sandu, F Parsapour, S Mertin, V Pashchenko, R Matloub, T LaGrange, ... physica status solidi (a) 216 (2), 1970015, 2019 | 3 | 2019 |
Paul MuraltProfessor in Materials Science, EPFL, Lausanne, SwitzerlandVerified email at epfl.ch
