Modeling reactive magnetron sputtering: a survey of different modeling approaches RR Madarász, A Kelemen, P Kádár Acta Universitatis Sapientiae, Informatica 12 (1), 112-136, 2020 | 4 | 2020 |
Stoichiometry control of the two gas reactive sputtering process RR Madarász, A Kelemen 2019 IEEE 19th International Symposium on Computational Intelligence and …, 2019 | 4 | 2019 |
Macroscopic Thin Film Deposition Model for the Two-Reactive-Gas Sputtering Process A Kelemen, D Biró, AZ Fekete, L Jakab-Farkas, RR Madarász Acta Universitatis Sapientiae Electrical and Mechanical Engineering 8 (1), 62-78, 2016 | 4 | 2016 |
Plasma ignition and current control considerations for magnetron sputtering power supplies RR Madarász, A Kelemen, AZ Fekete 2018 International IEEE Conference and Workshop in Óbuda on Electrical and …, 2018 | 3 | 2018 |
Reactive magnetron sputtering: an offline parameter identification method A Kelemen, RR MadarÁSz 2021 IEEE 15th International Symposium on Applied Computational Intelligence …, 2021 | 1 | 2021 |
Reactive Magnetron Sputtering Control Based on an Analytical Condition of Stoichiometry RR Madarász, A Kelemen Acta Universitatis Sapientiae, Electrical and Mechanical Engineering 15 (1 …, 0 | | |