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Chih-Hung Hsieh
Chih-Hung Hsieh
MIT, ASML
Verified email at mit.edu
Title
Cited by
Cited by
Year
Self-alignment of microchips using surface tension and solid edge
CG Tsai, CM Hsieh, JA Yeh
Sensors and Actuators A: Physical 139 (1-2), 343-349, 2007
702007
Conical photonic crystals for enhancing light extraction efficiency from high refractive index materials
JG Kim, CH Hsieh, HJ Choi, J Gardener, B Singh, A Knapitsch, P Lecoq, ...
Optics Express 23 (17), 22730-22739, 2015
222015
Compressive holographic two-dimensional localization with 1/302 subpixel accuracy
Y Liu, L Tian, CH Hsieh, G Barbastathis
Optics express 22 (8), 9774-9782, 2014
222014
Fabrication of wafer-level antireflective structures in optoelectronic applications
CM Hsieh, JY Chyan, WC Hsu, JA Yeh
2007 Ieee/Leos International Conference on Optical Mems and Nanophotonics …, 2007
132007
Large scale production of photonic crystals on scintillators
A Knapitsch, E Auffray, G Barbastathis, C Chevalier, CH Hsieh, JG Kim, ...
IEEE Transactions on Nuclear Science 63 (2), 639-643, 2016
92016
An investigation of the Young's modulus of single-crystalline wurtzite indium nitride using an atomic force microscopy based micromechanical bending test
YS Lu, CH Hsieh, S Gwo, MT Hou, JS Yao, JA Yeh
Applied Physics Letters 101 (22), 2012
72012
Apparatus For Aligning Microchips On Substrate And Method For The Same
JA Yeh, GCW Tsai, CM Hsieh, W Wen-Jey, H Yi-Ping, K Chi-Chun, ...
US Patent App. 11/552,955, 2007
42007
Edge placement error wafer mapping and investigation for improvement in advanced DRAM node
KM Chen, W Henke, JH Jung, E Kasperkiewicz, A Bouma, R Rahman, ...
Metrology, Inspection, and Process Control for Semiconductor Manufacturing …, 2021
32021
Design and manufacturing of all-dielectric optical metamaterial with gradient index of refraction
CH Hsieh
Massachusetts Institute of Technology, 2015
22015
Fabrication and characterization of thin-film nanostructured Lüneburg lens
CH Hsieh, J Xu, H Gao, NX Fang, G Barbastathis
2013 International Conference on Optical MEMS and Nanophotonics (OMN), 35-36, 2013
22013
Design and fabrication of dielectric nanostructured bending adaptor for optical frequencies
YS Lu, H Xu, H Gao, CM Hsieh, B Zhang, H Sun, G Barbastathis
2012 International Conference on Optical MEMS and Nanophotonics, 172-173, 2012
22012
Nanoparticle-embedded actuator based on localized surface plasmon resonance
CN Chen, JY Chyan, CM Hsieh, JA Yeh
Journal of Optics A: Pure and Applied Optics 10 (4), 044007, 2008
22008
Absolute overlay measurement based on voltage contrast defect inspection with programmed misalignments for DRAM devices
M Lee, J Kim, D Park, Y Han, J Yoon, SY Lee, C Hwang, A Woessner, ...
Metrology, Inspection, and Process Control XXXVI 12053, 382-388, 2022
12022
Implementation of the GRIN solid immersion lens
CH Hsieh, L Tian, YS Lu, B Zhang, G Barbastathis
2012 International Conference on Optical MEMS and Nanophotonics, 3-4, 2012
12012
Talbot lithography using aperiodic structures
HJ Choi, H Gao, L Tian, CH Chang, JG Kim, CH Hsieh, G Barbastathis
16th International Conference on Optical MEMS and Nanophotonics, 21-22, 2011
12011
Large field of view metrology: detecting critical edge placement error signatures not seen with small field of view in an HVM environment
M Ridane, I Chen, J Song, P Nikolsky, KM Chen, S Lee, S Park, K Lin, ...
Metrology, Inspection, and Process Control XXXVII 12496, 879-885, 2023
2023
蝕刻液、矽基板及其蝕刻方法
葉哲良, 錢俊逸, 謝志鴻, 王榮宗, 黃穩駿, 徐文慶, 何思樺
TW Patent I378,504, 2012
2012
Fabrication of Thin-film Nanostructured Luuml;neburg Lens with Guidance Condition Correction
CH Hsieh, H Gao, YS Lu, G Barbastathis
2012 MRS Fall Meeting & Exhibit Symposium BB Recent Advances in Optical …, 2012
2012
Microwave and Optical Beam Steering with Area-preserved Nonmagnetic Transformation Optics
H Xu, CHH Hsieh, H Gao, G Barbastathis, H Sun, B Zhang
2012 MRS Fall Meeting & Exhibit Symposium BB : Recent Advances in Optical …, 2012
2012
定位微元件于基板上的装置及其方法
叶哲良, 蔡智伟, 谢志鸿 , 翁文杰 , 黄一萍 , 高崎钧 , 周明宏 
CN Patent CN101,083,222, 2007
2007
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