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Chang Seok Kang
Chang Seok Kang
Senior Director, Applied Materials
Verified email at amat.com
Title
Cited by
Cited by
Year
Electrical and spectroscopic comparison of HfO2/Si interfaces on nitrided and un-nitrided Si(100)
PD Kirsch, CS Kang, J Lozano, JC Lee, JG Ekerdt
J. Appl. Phys. 91, 4353, 2003
3192003
A comparative study on the electrical conduction mechanisms of thin films on Pt and electrodes
CS Hwang, BT Lee, CS Kang, JW Kim, KH Lee, HJ Cho, H Horii, WD Kim, ...
Journal of Applied Physics 83 (7), 3703-3713, 1998
2111998
Bonding states and electrical properties of ultrathin gate dielectrics
CS Kang, HJ Cho, K Onishi, R Nieh, R Choi, S Gopalan, S Krishnan, ...
Applied Physics Letters 81 (14), 2593-2595, 2002
2072002
Depletion layer thickness and Schottky type carrier injection at the interface between Pt electrodes and thin films
CS Hwang, BT Lee, CS Kang, KH Lee, HJ Cho, H Hideki, WD Kim, SI Lee, ...
Journal of applied physics 85 (1), 287-295, 1999
1901999
Bias-temperature instabilities of polysilicon gate HfO/sub 2/MOSFETs
K Onishi, R Choi, CS Kang, HJ Cho, YH Kim, RE Nieh, J Han, ...
IEEE Transactions on Electron Devices 50 (6), 1517-1524, 2003
1682003
MOSFET devices with polysilicon on single-layer HfO/sub 2/high-K dielectrics
L Kang, K Onishi, Y Jeon, BH Lee, C Kang, WJ Qi, R Nieh, S Gopalan, ...
International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No …, 2000
1532000
The electrical and material characterization of hafnium oxynitride gate dielectrics with TaN-gate electrode
CS Kang, HJ Cho, R Choi, YH Kim, CY Kang, SJ Rhee, C Choi, MS Akbar, ...
IEEE transactions on electron devices 51 (2), 220-227, 2004
1382004
Characteristics of TaN gate MOSFET with ultrathin hafnium oxide (8/spl Aring/-12/spl Aring/)
BH Lee, R Choi, L Kang, S Gopalan, R Nieh, K Onishi, Y Jeon, WJ Qi, ...
International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No …, 2000
1262000
Improvement of surface carrier mobility of HfO/sub 2/MOSFETs by high-temperature forming gas annealing
K Onishi, CS Kang, R Choi, HJ Cho, S Gopalan, RE Nieh, SA Krishnan, ...
IEEE Transactions on Electron Devices 50 (2), 384-390, 2003
1232003
Characterization of resistivity and work function of sputtered-TaN film for gate electrode applications
CS Kang, HJ Cho, YH Kim, R Choi, K Onishi, A Shahriar, JC Lee
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2003
1202003
Three dimensional semiconductor memory devices
SM Hwang, H Kim, C Kang, W Cho, JJ Shim
US Patent 8,809,938, 2014
1062014
High-performance TaN/HfSiON/Si metal-oxide-semiconductor structures prepared by post-deposition anneal
MS Akbar, S Gopalan, HJ Cho, K Onishi, R Choi, R Nieh, CS Kang, ...
Applied physics letters 82 (11), 1757-1759, 2003
1022003
High-quality ultra-thin HfO/sub 2/gate dielectric MOSFETs with TaN electrode and nitridation surface preparation
R Choi, CS Kang, BH Lee, K Onishi, R Nieh, S Gopalan, E Dharmarajan, ...
2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No …, 2001
1002001
Deposition and electrical characterization of very thin SrTiO3 films for ultra large scale integrated dynamic random access memory application
CS Hwang, SO Park, CS Kang, HJ Cho, HK Kang, ST Ahn, MYLMY Lee
Japanese journal of applied physics 34 (9S), 5178, 1995
991995
High-k dielectrics and MOSFET characteristics
JC Lee, HJ Cho, CS Kang, S Rhee, YH Kim, R Choi, CY Kang, C Choi, ...
IEEE International Electron Devices Meeting 2003, 4.4. 1-4.4. 4, 2003
902003
Evaluation of silicon surface nitridation effects on ultra-thin gate dielectrics
R Nieh, R Choi, S Gopalan, K Onishi, CS Kang, HJ Cho, S Krishnan, ...
Applied physics letters 81 (9), 1663-1665, 2002
892002
Thermally robust Ta/sub 2/O/sub 5/capacitor for the 256-Mbit DRAM
KW Kwon, CS Kang, SO Park, HK Kang, ST Ahn
IEEE Transactions on Electron Devices 43 (6), 919-923, 1996
891996
Electrical characterization and material evaluation of zirconium oxynitride gate dielectric in TaN-gated NMOSFETs with high-temperature forming gas annealing
RE Nieh, CS Kang, HJ Cho, K Onishi, R Choi, S Krishnan, JH Han, ...
IEEE Transactions on electron devices 50 (2), 333-340, 2003
832003
Structural and electrical properties of HfO2 with top nitrogen incorporated layer
HJ Cho, CS Kang, K Onishi, S Gopalan, R Nieh, R Choi, S Krishnan, ...
IEEE Electron Device Letters 23 (5), 249-251, 2002
772002
Vertical structure nonvolatile memory devices
BI Choe, SI Chang, C Kang, JS Lim
US Patent 8,513,729, 2013
742013
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