| Estimating step heights from top-down sem images KT Arat, J Bolten, AC Zonnevylle, P Kruit, CW Hagen Microscopy and Microanalysis 25 (4), 903-911, 2019 | 11 | 2019 |
| Model sensitivity analysis of Monte-Carlo based SEM simulations KT Arat, CW Hagen Results in Physics 19, 103545, 2020 | 10 | 2020 |
| Charge-induced pattern displacement in E-beam lithography KT Arat, T Klimpel, AC Zonnevylle, WSMM Ketelaars, CTH Heerkens, ... Journal of Vacuum Science & Technology B 37 (5), 2019 | 10 | 2019 |
| Model improvements to simulate charging in scanning electron microscope KT Arat, T Klimpel, CW Hagen Journal of Micro/Nanolithography, MEMS, and MOEMS 18 (4), 044003-044003, 2019 | 9 | 2019 |
| Electron beam lithography on curved or tilted surfaces: Simulations and experiments KT Arat, AC Zonnevylle, WSMM Ketelaars, N Belic, U Hofmann, ... Journal of Vacuum Science & Technology B 37 (5), 2019 | 6 | 2019 |
| Electric fields in scanning electron microscopy simulations KT Arat, J Bolten, T Klimpel, N Unal Metrology, Inspection, and Process Control for Microlithography XXX 9778 …, 2016 | 6 | 2016 |
| Model improvements to simulate charging in SEM KT Arat, T Klimpel, CW Hagen Metrology, Inspection, and Process Control for Microlithography XXXII 10585 …, 2018 | 2 | 2018 |
| A Highly Integrated AFM-SEM Correlative Analysis Platform A Alipour, KT Arat, H Alemansour, L Montes, J Gardiner, J Diederichs, ... Microscopy Today 31 (6), 17-22, 2023 | 1 | 2023 |
| Simulation of Electron-Matter Interaction in Electron Beam Lithography and Metrology KT Arat | 1 | 2021 |
| Challenges for scanning electron microscopy and inspection on the nanometer scale for non-IC application: and how to tackle them using computational techniques J Bolten, KT Arat, N Ünal, C Porschatis, T Wahlbrink, MC Lemme 33rd European Mask and Lithography Conference 10446, 83-88, 2017 | 1 | 2017 |
| A New Correlative Microscopy Platform Integrating AFM with in situ SEM K Arat, H Alemansour, A Aman, L Montes, J Gardiner, CH Schwalb, ... Microscopy and Microanalysis 29 (Supplement_1), 1944-1945, 2023 | | 2023 |
| Limits of Resolutions in the Scanning Electron Microscope AE Vladár, KT Arat Microscopy and Microanalysis 29 (Supplement_1), 463-464, 2023 | | 2023 |
| Measurement methods and reference artifacts for the characterization of the SEM and its electron beam AE Vladár, K Arat, R Polster Metrology, Inspection, and Process Control XXXVI, PC1205309, 2022 | | 2022 |
| Getting your Scanning Electron Microscope to Perform at Atomic Resolution Levels A Vladar, K Arat Microscopy and Microanalysis 27 (S1), 1328-1329, 2021 | | 2021 |
Jens BoltenAMO GmbHVerified email at amo.de
